CHA Mark 50 Evaporation Components 

Phone: 925 682-4420   Fax: 925  682-4419

CHA Mark 50 e-Gun

EB Sources manufactures replacement and new electron beam parts for the CHA Mark 50 evaporator. Our e-gun parts are designed to meet or exceed CHA Mark 50 specifications. We offer quick turn around and support for your custom applications. 



Feed thrus

Shutter Assemblies

Crucible Drive Motor

Rebuilding Services

Custom Source Components

Spare parts

Power Supplies

Used Equipment

EB Sources listened to customers of CHA, TFI Telemark and Temescal electron beam source systems and designed replacement parts to meet orContact Us exceed OEM specifications. Our parts are tested with our in-house system to ensure quality fit and function.

E-Gun Upgrades and the Cost of Ownership.

By upgrading your existing 4 terminal sweep coil assembly, the exposed threaded terminals are eliminated.

The EB Sources sweep coil is self contained and hermitically sealed connections. The mating connector is made of ceramic containing selectively gold-plated electrical contact pins. The connector is keyed to eliminate wiring errors.

The outer shell is made of 304 SS for rugged service and contains two ceramic inserts to contain the Kapton sweep control signal wires. The Ultrahigh and High vacuum compatible Kapton insulated wire is constructed with silver plated copper wire.


EB Sources Mission
Our mission is constant improvement in products and services to meet our customer needs and be the most cost effective total solution provider in the semiconductor processing equipment industry worldwide.

We partner with our customers to exceed their expectations and further our endeavor for excellence.