3231 Monument Way, Unit E
Concord, CA 94518
(925) 682-4420

Electron-beam evaporation sources — eight models, built to order.

EB1 through EB12 — single and multi-pocket sources. They're real standard models with real specs, and every one is built to order: you start with the model that fits your process, and we adapt it to your chamber. Picking a gun comes down to three things — how many pockets you need, how much material you want to evaporate, and how many different materials your process calls for.

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Line-wide

  • Beam voltage 5–10 kV standard; EB2, EB5, EB8 run 6–10 kV
  • Coil 12 V ±1 A
  • Water-cooled; bottom or side drive on multi-pocket models
  • Crucible / pocket menu: 4, 7, 15, 25, 40 and 100 cc — pocket counts vary by model (see the table); plus pan or trough crucibles

Model Specifications

E-gun source specifications, EB1–EB12. A dash (—) is a figure we’ll confirm for your configuration — just ask.
Model TypePowerBeam voltageCrucibleOverall sizeWeight
EB1 Single-pocket6 kW5–10 kV4, 7 or 15 cc (1 pkt)≈3.2 × 3.2 × 5.0 in6 lbs
EB2 ★ Most popular Multi-pocket10 kW6–10 kV7/15 cc (6 pkt), 25 cc (4 or 6 pkt), 40 cc (4 pkt)≈4.3 × 8.0 × 13.0 in46 lbs
EB3 Multi-pocket10 kW5–10 kV7/15 cc (6 pkt), up to 25 cc (4 pkt) — no 40 cc≈4.3 × 6.1 × 10.1 in40 lbs (18.14 kg)
EB5 Single-pocket15 kW6–10 kV7, 15, 25, 40 and 100 cc (1 pkt)≈2.9 × 4.8 × 10.8 in20 lbs
EB6 Linear UHV6 kW5–10 kVSliding crucible, 4, 7 or 15 cc — no 25/40 cc · 3–5 pkt3.53 × 3.25 × 6.375 in32 lbs
EB8 Multi-pocket10 kW6–10 kVup to 6 × 40 cc≈4.8 × 9.5 × 13.1 in82 lbs
EB11 Multi-pocket6 kW5–10 kV4 cc or 7 cc (4–6 pkt)≈4.0 × 4.0 × 7.0 in14.3 lbs
EB12 Multi-pocket10 kW10 kV (emission to 1 A)7, 15, 25, 40 cc — up to 12 pkt · 12×40cc achievable——

Dimensioned drawings

General-arrangement sheets with full mounting dimensions, so you can locate the source in your chamber before you order. Click any drawing to open it full size — and if you want us to check the fit against your port, send it over.

The Models

EB1 single-pocket electron-beam source: aluminium body with a water-cooled copper hearth showing one round pocket and one rectangular pocket.

EB1

Single-pocket · 6 kW

A single-pocket source built for production and built to depend on — replaceable crucibles and coil, and a footprint that fits tight chambers.

Best for: dependable single-material runs and tight chambers.

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EB2 multi-pocket electron-beam source, the production standard, shown from above with its copper hearth and mounting brackets. ★ Most popular

EB2

Multi-pocket · 10 kW

Our most popular source and the workhorse of everyday production — load several materials in one pump-down and switch between them with ease. Improved magnetics and water cooling for better material usage, and every copper part lifts out inside the chamber for fast cleaning.

Best for: everyday multi-material production.

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EB3 multi-pocket electron-beam source with a removable copper hearth and side drive.

EB3

Multi-pocket · 10 kW

A multi-pocket source for demanding production, with every copper part removable inside the chamber for fast, frequent cleaning.

Best for: heavy production with frequent maintenance.

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EB5 single-pocket 15 kW electron-beam source with a large-volume copper crucible.

EB5

Single-pocket · 15 kW

The big single-pocket source — high power and up to 100 cc, with cooling built for long runs.

Best for: large-volume, high-power single-material runs.

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EB6 linear ultra-high-vacuum source: water-cooled copper trough with four pockets and shield plates, on a sliding shaft with bellows, mounting flange, and high-voltage feedthrough.

EB6

Linear UHV · 6 kW

A linear source with a sliding crucible, built for ultra-high vacuum — the lab and research choice, not a rotary turret.

Best for: laboratory, university, and R&D work in ultra-high vacuum.

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EB8 large-volume multi-pocket electron-beam source with a six-pocket copper hearth.

EB8

Multi-pocket · 10 kW

A larger-volume multi-pocket source for bigger loads and longer runs — up to six pockets at 40 cc.

Best for: bigger material loads and longer production runs.

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EB11 compact multi-pocket electron-beam source built for tight chambers.

EB11

Multi-pocket · 6 kW

A compact multi-pocket source for tight setups that still need to switch materials — 4 or 7 cc across 4 to 6 pockets.

Best for: compact multi-material setups.

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EB12 full-production electron-beam source: low-profile copper top plate with a central hearth well and clamp straps, on its support frame.

EB12

Multi-pocket · 10 kW

The full production source — up to twelve 40 cc pockets in a low-profile body, built to load the most materials in one pump-down.

Best for: the most materials in one pump-down; large-area coating.

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Components & Parts

Feed-thrus, coils, crucibles, emitters, and custom parts — including for Telemark & Temescal.

This catalog shows the sources and parts EB Sources builds. For current availability, lead times and stock, contact us — we'll confirm what fits your system.

Feed-thrus

High-voltage, octal, water, rotary, gas and shaft-seal feed-thrus. Flange options as marked — 1", 32 mm or 2 3/4" CFF.

  • Right-angle feed-thru assembly — EB Sources Right-angle feed-thru assembly
  • Feed-thru nut — EB Sources Feed-thru nut
  • Feed-thru washer — EB Sources Feed-thru washer
PhotoPart No.Description
2200 HV Feed Thru: 70 A @ 10 kV — EB Sources 2200 HV Feed Thru: 70 A @ 10 kV — Heavy-duty maintenance design for years of reliable service. 1", 32 mm or 2 3/4" CFF.
2200TP HV Feed Thru — EB Sources 2200TP HV Feed Thru
AO550-3 HV Custom Clamp Set — EB Sources AO550-3 HV Custom Clamp Set
2260 HV Shield
2100 Octal Feed Thru — EB Sources 2100 Octal Feed Thru — Heavy-duty cap protects the ceramic plug in the chamber. The connector at the bottom is custom made with heavy-duty gold pins for positive connection. 1", 32 mm or 2 3/4".
2300 2-Pass Water Feed Thru, 3/8" — EB Sources 2300 2-Pass Water Feed Thru, 3/8" — 3/8" water lines. Standard e-gun water line. Available on 1", 32 mm or 2 3/4" CFF.
2000 2-Pass Water Feed Thru, 1/2" — EB Sources 2000 2-Pass Water Feed Thru, 1/2" — 1/2" water lines on a 1" feed-thru. 1/2" VCO fittings. Comes apart from the chamber easily for cleaning. All stainless steel.
2700 Rotary Feed Thru — EB Sources 2700 Rotary Feed Thru — Quad-ring sealed feed-thru, for shutter or for source drive. Available on 1", 32 mm or 2 3/4" CFF.
2750 Right Angle Rotary Feed Thru — EB Sources 2750 Right Angle Rotary Feed Thru — Quad-ring sealed. Easy to disassemble for cleaning.
2550 Gas Feed Thru — Available with 1/4" thru hole or 1/8" NPT, or with a 1/4" pipe welded. Available in 1", 32 mm or 2 3/4" CFF.
2500 3/4" Shaft or Ion Source Feed Thru — Bottom shaft seal. Available on 1", 32 mm or a 2 3/4" CFF.

Crucibles & Cover Plates

Crucibles, bases, clamps and cover plates across the pocket range — Telemark, Temescal and EB Sources fitments, machined in-house. The photographs below are representative of what we build; sizes and pocket counts are made to your system. Tell us the source and pocket size and we will confirm the fit.

  • Crucible — machined in-house — EB Sources Crucible — machined in-house
  • Crucible, pocket detail — EB Sources Crucible, pocket detail
  • Crucible cover plates — EB Sources Crucible cover plates

Coils & Coil Kits

Coil assemblies, coil plate housings and coil blocks by model.

PhotoPart No.Description
2450 Coil Assembly — EB Sources 2450 Coil Assembly Fits EB12, EB2, EB3, EB5
2450-C Standard Coil Assembly
2475 Coil Assembly — EB Sources 2475 Coil Assembly Fits EB1, EB11
2475-1 Coil Assembly Fits EB11
EB-2450-1 Coil Assembly Fits EB12, EB2, EB5
2455 Coil Clip Fits EB12, EB2, EB3, EB5
3006 Coil Plate Housing Fits EB12
3106 Coil Plate Housing Fits EB3
EB2-2406 Coil Plate Housing Fits EB2
3306 Coil / Main Block Fits EB11
3362 Coil Block Fits EB11
3201 Main Body (Coil Hsg) Fits EB1
EB5-2801 Main Body (Coil Hsg) Fits EB5

Front Shield Assembly

Front shield, swapped out at cleaning time.

  • Front shield assembly — EB Sources Front shield assembly
  • Beam shield / emitter shield — EB Sources Beam shield / emitter shield
PhotoPart No.Description
3017-1 Front Shield Fits EB12

Coil Connector Parts

Connector housings, ceramic inserts, connectors and Kapton wire assemblies.

  • Coil connector assembly — EB Sources Coil connector assembly
PhotoPart No.Description
2452A Coil Connector Housing Fits EB1, EB11, EB12, EB2, EB3, EB5
2452B Ceramic Inserts Fits EB1, EB11, EB12, EB2, EB3, EB5
2456B Ceramic Insert, Coil
2456 Coil Connector Fits EB1, EB11, EB12, EB2, EB3, EB5
EB2456 Coil Connector Assembly
2456-1 Kapton Wire Assemblies — Standard length is 2'. Fits EB1, EB11, EB12, EB2, EB3, EB5
2456-1W Coil Connector Wire Assembly
EB-2452 Kapton Wire Assembly Fits EB5

Octal Feed-Thru Receptacles & Covers

Vacuum- and atmosphere-side receptacles and the protective cap.

  • Octal feed-thru, vacuum-side receptacle — EB Sources Octal feed-thru, vacuum-side receptacle
  • Octal feed-thru, atmosphere-side receptacle and cover — EB Sources Octal feed-thru, atmosphere-side receptacle and cover
PhotoPart No.Description
2100N Octal Feedthru
2103N Octal Feedthru Cap

Filament Transformer Cover

Cover housing for the filament transformer.

PhotoPart No.Description
3593 Transformer Cover Housing

HV Covers

High-voltage shielding over the HV feed-thru.

  • HV covers — EB Sources HV covers
  • HV lug — EB Sources HV lug
PhotoPart No.Description
1017 HV Shield — EB Sources 1017 HV Shield Fits EB11, EB12, EB2, EB3, EB5

Prices are quoted per order — configurations, quantities and lead times vary. Don't see the part you need? We machine custom and replacement parts for CHA, Telemark and Temescal systems. Send us the part number or a drawing.

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