Virtual height: why source design shows up in your uniformity.

When you evaporate from an e-beam source, the vapor doesn't behave as if it leaves the melt surface. It behaves as if it originates from a point a short distance above it — the virtual source height, Hv.

What sets Hv: melt-pool geometry, the beam sweep pattern, pool depth, vapor collisions near the source, pocket shape, and how the material wets.

Cross-section of an e-beam source: the electron beam bends 270 degrees into the crucible pocket; the vapor cone extrapolates back to a virtual source point a height Hv above the melt surface.
The vapor rises to a virtual source point a height Hv above the melt surface — thickness uniformity is calculated from that point, not the crucible.

Why it matters to your coating

  • Thickness uniformity is calculated from the virtual source location — not the crucible.
  • A higher Hv puts the apparent source closer to the substrate: broader distribution, better edge coverage. A lower Hv is more directional: higher center thickness, lower edge.
  • Tooling factors depend on it. Veeco, Temescal, and Kurt J. Lesker calculations all use a specified virtual source height, not the physical crucible location.
  • Shadowing: on deep pockets, optical mounts, MEMS, and tall fixtures, Hv determines which surfaces the vapor stream can actually reach.

A quick example: melt surface at 0, Hv at +4 inches, substrate 24 inches above the source — your software treats the throw as 24 − 4 = 20 inches, which changes deposition rate, tooling factor, and uniformity.

Typical virtual heights: a small 4-pocket source runs 1–3 inches; a 6–10 kW source, 2–6 inches; large optical coaters, 4–12 inches. Swept rectangular pools are determined experimentally.

Here's the point for choosing a source: steady magnetics, steady cooling, and a controlled pocket and sweep give you a predictable virtual height — and a predictable virtual height is what makes your uniformity repeatable. That's a concrete reason the design of the source shows up in your results.

Spec a source for your process

Tell us your fixture geometry and materials — we'll help match the source and virtual height.